发明申请
US20100128090A1 Mems Bubble Generator Incorporating Superalloy Heater In Direct Contact With Bubble Formation Liquid Without Intervening Protective Coating
有权
Mems气泡发生器结合超合金加热器直接接触气泡形成液体，无需中间保护涂层
- 专利标题： Mems Bubble Generator Incorporating Superalloy Heater In Direct Contact With Bubble Formation Liquid Without Intervening Protective Coating
- 专利标题（中）： Mems气泡发生器结合超合金加热器直接接触气泡形成液体，无需中间保护涂层
-
申请号： US12642835申请日： 2009-12-20
-
公开(公告)号： US20100128090A1公开(公告)日： 2010-05-27
- 发明人: Kia Silverbrook , Roger Mervyn Lloyd Foote , Angus John North , Jennifer Mia Fishburn , Paul David Lunsmann , Alexandra Artemis Papadakis , Channarayapatna Shankar Lakshmi , Frederik Jacobus Crous , Matthew Stewart Walker , Samuel George Mallinson , Paul Justin Reichl
- 申请人： Kia Silverbrook , Roger Mervyn Lloyd Foote , Angus John North , Jennifer Mia Fishburn , Paul David Lunsmann , Alexandra Artemis Papadakis , Channarayapatna Shankar Lakshmi , Frederik Jacobus Crous , Matthew Stewart Walker , Samuel George Mallinson , Paul Justin Reichl
- 专利权人： Silverbrook Research Pty Ltd
- 当前专利权人： Silverbrook Research Pty Ltd
- 主分类号： B41J2/05
- IPC分类号： B41J2/05
摘要：
A MEMS vapor bubble generator includes a chamber for holding liquid; and a heater positioned in the chamber, the heater being formed using a sputtering technique. The heater is formed from a superalloy material. The superalloy material of the heater is in direct contact with the liquid, without any intervening protective coating. The superalloy has a crystalline structure with a grain size less than 100 nano-metres. The superalloy is MCrAlX, where M is one or more of Ni, Co, Fe with M contributing at least 50% by weight, Cr contributing between 8% and 35% by weight, Al contributing more than zero but less than 8% by weight, and X contributing less than 25% by weight, with X consisting of zero or more other elements, preferably including but not limited to Mo, Re, Ru, Ti, Ta, V, W, Nb, Zr, B, C, Si, Y, Hf.
公开/授权文献
信息查询
IPC分类:
