发明申请
- 专利标题： Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
- 专利标题（中）： 扫描电子显微镜和电子扫描显微镜的分辨率评估样本和方法
-
申请号： US12588517申请日： 2009-10-19
-
公开(公告)号： US20100133426A1公开(公告)日： 2010-06-03
- 发明人: Mayuka Oosaki , Chie Shishido , Maki Tanaka , Hiroki Kawada
- 申请人： Mayuka Oosaki , Chie Shishido , Maki Tanaka , Hiroki Kawada
- 优先权： JP2006-253718 20060920
- 主分类号： G01D18/00
- IPC分类号： G01D18/00 ; G01N23/00
摘要：
A method of evaluating a resolution of a scanning electron microscope includes picking up a first image of a concave and convex pattern formed on a surface of a sample utilizing a first scanning electron microscope, picking up a second image of the concave and convex pattern on the sample utilizing a second scanning electron microscope, respectively processing the first image and the second image in order to evaluate unevenness in resolution between the first scanning electron microscope and the second scanning electron microscope, and determining whether a height of the concave and convex pattern as measured from a bottom thereof is sufficient so that no affection by a secondary electron emitted from the bottom of the concave and convex pattern is exhibited.