Invention Application
US20100133641A1 Image Sensor and Method for Manufacturing the Same 失效
图像传感器及其制造方法

  • Patent Title: Image Sensor and Method for Manufacturing the Same
  • Patent Title (中): 图像传感器及其制造方法
  • Application No.: US12625300
    Application Date: 2009-11-24
  • Publication No.: US20100133641A1
    Publication Date: 2010-06-03
  • Inventor: TAE GYU KIM
  • Applicant: TAE GYU KIM
  • Priority: KR10-2008-0121718 20081203
  • Main IPC: H01L31/02
  • IPC: H01L31/02 H01L31/18
Image Sensor and Method for Manufacturing the Same
Abstract:
Provided are an image sensor and a method for manufacturing the same. The image sensor comprises a semiconductor substrate, an interconnection and an interlayer dielectric, a lower electrode layer, an image sensing device, a first via hole, a barrier pattern, a second via hole, and a metal contact. The semiconductor substrate comprises a readout circuitry. The interconnection and the interlayer dielectric are formed on the semiconductor substrate. The lower electrode layer is disposed over the interlayer dielectric. The image sensing device is disposed on the lower electrode layer. The first via hole is formed through the image sensing device. The barrier pattern is formed on a sidewall of the first via hole. The second via hole is formed through the lower electrode layer and the interlayer dielectric under the first via hole. The metal contact is formed in the first and second via holes.
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