发明申请
- 专利标题: METAL INTERCONNECT AND IC CHIP INCLUDING METAL INTERCONNECT
- 专利标题(中): 金属互连和IC芯片,包括金属互连
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申请号: US12701045申请日: 2010-02-05
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公开(公告)号: US20100133694A1公开(公告)日: 2010-06-03
- 发明人: Karl W. Barth , Ramona Kei , Kaushik A. Kumar , Kevin S. Petrarca , Shahab Siddiqui
- 申请人: Karl W. Barth , Ramona Kei , Kaushik A. Kumar , Kevin S. Petrarca , Shahab Siddiqui
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/498
摘要:
A metal interconnect and an IC chip including the metal interconnect are disclosed. One embodiment of the method may include providing an integrated circuit (IC) chip up to and including a middle of line (MOL) layer, the MOL layer including a contact positioned within a first dielectric; recessing the first dielectric such that the contact extends beyond an upper surface of the first dielectric; forming a second dielectric over the first dielectric such that the second dielectric surrounds at least a portion of the contact, the second dielectric having a lower dielectric constant than the first dielectric; forming a planarizing layer over the second dielectric; forming an opening through the planarizing layer and into the second dielectric to the contact; and forming a metal in the opening to form the metal interconnect.
公开/授权文献
- US07851919B2 Metal interconnect and IC chip including metal interconnect 公开/授权日:2010-12-14
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