发明申请
US20100134207A1 Nano electromechanical integrated-circuit bank and switch 有权
纳米机电集成电路组和开关

Nano electromechanical integrated-circuit bank and switch
摘要:
A bank of nano electromechanical integrated circuit filters. The bank of integrated circuit filters comprising a silicon substrate; a sacrificial layer; a device layer including at least two resonators, wherein the at least two resonators include sub-micro excitable elements and wherein the at least two resonators posses a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements. At least one switch connects to the bank of integrated circuit filters.
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