发明申请
- 专利标题: Nano electromechanical integrated-circuit bank and switch
- 专利标题(中): 纳米机电集成电路组和开关
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申请号: US12311143申请日: 2007-09-20
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公开(公告)号: US20100134207A1公开(公告)日: 2010-06-03
- 发明人: Pritiraj Mohanty , Robert L. Badzey
- 申请人: Pritiraj Mohanty , Robert L. Badzey
- 申请人地址: US MA BOSTON
- 专利权人: TRUSTEES OF BOSTON UNIVERSITY
- 当前专利权人: TRUSTEES OF BOSTON UNIVERSITY
- 当前专利权人地址: US MA BOSTON
- 国际申请: PCT/US2007/079078 WO 20070920
- 主分类号: H03H9/00
- IPC分类号: H03H9/00
摘要:
A bank of nano electromechanical integrated circuit filters. The bank of integrated circuit filters comprising a silicon substrate; a sacrificial layer; a device layer including at least two resonators, wherein the at least two resonators include sub-micro excitable elements and wherein the at least two resonators posses a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements. At least one switch connects to the bank of integrated circuit filters.
公开/授权文献
- US08487715B2 Nano electromechanical integrated-circuit bank and switch 公开/授权日:2013-07-16
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