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发明申请
US20100140231A1 ARC RECOVERY WITH OVER-VOLTAGE PROTECTION FOR PLASMA-CHAMBER POWER SUPPLIES 有权
电弧恢复与等离子体电源的过电压保护

  • 专利标题： ARC RECOVERY WITH OVER-VOLTAGE PROTECTION FOR PLASMA-CHAMBER POWER SUPPLIES
  • 专利标题（中）： 电弧恢复与等离子体电源的过电压保护
  • 申请号： US12631735
    申请日： 2009-12-04
  • 公开(公告)号： US20100140231A1
    公开(公告)日： 2010-06-10
  • 发明人: Milan Ilic
  • 申请人： Milan Ilic
  • 主分类号： B23K9/06
  • IPC分类号： B23K9/06
ARC RECOVERY WITH OVER-VOLTAGE PROTECTION FOR PLASMA-CHAMBER POWER SUPPLIES
摘要：
A system and method for managing power delivered to a processing chamber is described. In one embodiment current is drawn away from the plasma processing chamber while initiating an application of power to the plasma processing chamber during an initial period of time, the amount of current being drawn away decreasing during the initial period of time so as to increase the amount of power applied to the plasma processing chamber during the initial period of time.
摘要（中）：

描述了用于管理传送到处理室的功率的系统和方法。 在一个实施例中，电流从等离子体处理室被拉出，同时在初始时间段期间开始向等离子体处理室施加电力，在初始时间段内电流的量被减少，从而增加量 在初始时间期间施加到等离子体处理室的功率。

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