发明申请
- 专利标题： ELECTROSTATIC CHUCK WITH COMPLIANT COAT
- 专利标题（中）： 具有合身涂层的静电卡盘
-
申请号： US12331813申请日： 2008-12-10
-
公开(公告)号： US20100142114A1公开(公告)日： 2010-06-10
- 发明人: Ashwin M. Purohit , Marvin R. LaFontaine , William D. Lee , Richard J. Rzeszut
- 申请人： Ashwin M. Purohit , Marvin R. LaFontaine , William D. Lee , Richard J. Rzeszut
- 申请人地址： US MA Beverly
- 专利权人： Axcelis Technologies, Inc.
- 当前专利权人： Axcelis Technologies, Inc.
- 当前专利权人地址： US MA Beverly
- 主分类号： H01L21/683
- IPC分类号： H01L21/683
摘要：
The present invention is directed to an electrostatic chuck (ESC) with a compliant layer formed from TT-Kote® and a method of forming a clamping plate for an ESC. The ESC comprises a compliant layer having a low friction surface for reducing or eliminating particulates generated from thermal expansion. The method comprises forming a clamping member for a substrate comprising a ceramic material and a ceramic surface, and coating the ceramic surface with a compliant layer comprising an organic silicide or TT-Kote®.
公开/授权文献
- US08023247B2 Electrostatic chuck with compliant coat 公开/授权日：2011-09-20
信息查询
IPC分类:
