发明申请
- 专利标题： METHOD OF FORMING OPTICAL WAVEGUIDE
- 专利标题（中）： 形成光波导的方法
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申请号： US12491443申请日： 2009-06-25
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公开(公告)号： US20100144075A1公开(公告)日： 2010-06-10
- 发明人: In-Gyoo Kim , Dong-Woo Suh , Gyung-Ock Kim
- 申请人： In-Gyoo Kim , Dong-Woo Suh , Gyung-Ock Kim
- 申请人地址： KR Daejeon
- 专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人地址： KR Daejeon
- 优先权： KR10-2008-0123097 20081205
- 主分类号： H01L33/00
- IPC分类号： H01L33/00
摘要：
Provided is a method of forming optical waveguide. The method includes forming a trench on a semiconductor substrate to define an active portion, and partially oxidizing the active portion. An non-oxidized portion of the active portion is included in a core through which an optical signal passes, and an oxidized portion of the active portion is included in a cladding.
公开/授权文献
- US08017420B2 Method of forming optical waveguide 公开/授权日：2011-09-13