Invention Application
- Patent Title: METHOD OF FORMING OPTICAL WAVEGUIDE
- Patent Title (中): 形成光波导的方法
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Application No.: US12491443Application Date: 2009-06-25
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Publication No.: US20100144075A1Publication Date: 2010-06-10
- Inventor: In-Gyoo Kim , Dong-Woo Suh , Gyung-Ock Kim
- Applicant: In-Gyoo Kim , Dong-Woo Suh , Gyung-Ock Kim
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2008-0123097 20081205
- Main IPC: H01L33/00
- IPC: H01L33/00
Abstract:
Provided is a method of forming optical waveguide. The method includes forming a trench on a semiconductor substrate to define an active portion, and partially oxidizing the active portion. An non-oxidized portion of the active portion is included in a core through which an optical signal passes, and an oxidized portion of the active portion is included in a cladding.
Public/Granted literature
- US08017420B2 Method of forming optical waveguide Public/Granted day:2011-09-13
Information query
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