发明申请
- 专利标题: Semiconductor Device and Method of Forming Conductive Posts Embedded in Photosensitive Encapsulant
- 专利标题(中): 半导体器件和嵌入光敏性封装剂中的导电柱形成方法
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申请号: US12329430申请日: 2008-12-05
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公开(公告)号: US20100144101A1公开(公告)日: 2010-06-10
- 发明人: Seng Guan Chow , Il Kwon Shim , Heap Hoe Kuan , Rui Huang
- 申请人: Seng Guan Chow , Il Kwon Shim , Heap Hoe Kuan , Rui Huang
- 申请人地址: SG Singapore
- 专利权人: STATS CHIPPAC, LTD.
- 当前专利权人: STATS CHIPPAC, LTD.
- 当前专利权人地址: SG Singapore
- 主分类号: H01L21/56
- IPC分类号: H01L21/56
摘要:
A semiconductor package includes a post carrier having a base plate and plurality of conductive posts. A photosensitive encapsulant is deposited over the base plate of the post carrier and around the conductive posts. The photosensitive encapsulant is etched to expose a portion of the base plate of the post carrier. A semiconductor die is mounted to the base plate of the post carrier within the etched portions of the photosensitive encapsulant. A second encapsulant is deposited over the semiconductor die. A first circuit build-up layer is formed over the second encapsulant. The first circuit build-up layer is electrically connected to the conductive posts. The base plate of the post carrier is removed and a second circuit build-up layer is formed over the semiconductor die and the photosensitive encapsulant opposite the first circuit build-up layer. The second circuit build-up layer is electrically connected to the conductive posts.
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