发明申请
- 专利标题: PIEZOELECTRIC ACTUATOR INKJET HEAD AND METHOD OF FORMING THE SAME
- 专利标题(中): 压电致动器喷嘴头及其形成方法
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申请号: US12712442申请日: 2010-02-25
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公开(公告)号: US20100146756A1公开(公告)日: 2010-06-17
- 发明人: Tae-kyung LEE , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
- 申请人: Tae-kyung LEE , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd
- 当前专利权人: Samsung Electronics Co., Ltd
- 当前专利权人地址: KR Suwon-si
- 优先权: KR2006-16229 20060220
- 主分类号: H01L41/22
- IPC分类号: H01L41/22
摘要:
A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.
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