发明申请
US20100155230A1 Method of Fabricating Bubble-Type Micro-Pump 有权
制造气泡型微型泵的方法

  • 专利标题: Method of Fabricating Bubble-Type Micro-Pump
  • 专利标题(中): 制造气泡型微型泵的方法
  • 申请号: US12610736
    申请日: 2009-11-02
  • 公开(公告)号: US20100155230A1
    公开(公告)日: 2010-06-24
  • 发明人: Chen Peng
  • 申请人: Chen Peng
  • 申请人地址: TW Gueishan Township
  • 专利权人: DAXON TECHNOLOGY INC.
  • 当前专利权人: DAXON TECHNOLOGY INC.
  • 当前专利权人地址: TW Gueishan Township
  • 优先权: TW97149831 20081219
  • 主分类号: C23C14/34
  • IPC分类号: C23C14/34 C23C14/28
Method of Fabricating Bubble-Type Micro-Pump
摘要:
A manufacturing method of a bubble-type micro-pump is provided. At least a bubble-generating unit is provided on the bubble-generating section. Because of the varied surface energies on the top of the bubble-generating section, the varied backfilling velocities of the fluid of the front end and the rear end cause fluid moving when a bubble vanishes. The top surface of the bubble-generating section is subjected to a particular surface treatment to form a surface energy gradient. Examples of surface treatment include sputtering a thin film with varied densities or thickness, radiating one or multi-layer thin films by a laser beam, etc.
公开/授权文献
信息查询
0/0