发明申请
- 专利标题: Stage apparatus
- 专利标题(中): 舞台装置
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申请号: US12318251申请日: 2008-12-23
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公开(公告)号: US20100155560A1公开(公告)日: 2010-06-24
- 发明人: Fuminori Makino
- 申请人: Fuminori Makino
- 专利权人: Sumitomo Heavy Industries, Ltd.
- 当前专利权人: Sumitomo Heavy Industries, Ltd.
- 主分类号: A47B81/00
- IPC分类号: A47B81/00
摘要:
The present invention reduces the footprint of a stage apparatus to achieve a more compact apparatus. Using a Y-axis shaft having a magnet on the inside and a Y-axis mover constituted by a coil that surrounds the Y-axis shaft as a Y-axis drive part for moving a Y-axis movable body makes the drive part smaller than a linear motor. Consequently, a lateral part that faces a side gliding surface is arranged downwardly of the one Y-axis mover, to thereby eliminate the footprint occupied by the lateral part when lined up side-by-side with the Y-axis drive part.
公开/授权文献
- US07959141B2 Stage apparatus 公开/授权日:2011-06-14
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