发明申请
- 专利标题: OXYNITRIDE PIEZOELECTRIC MATERIAL AND METHOD OF PRODUCING THE SAME
- 专利标题(中): 氧化物压电材料及其制造方法
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申请号: US12639473申请日: 2009-12-16
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公开(公告)号: US20100155647A1公开(公告)日: 2010-06-24
- 发明人: Hiroshi Saito , Takanori Matsuda , Kaoru Miura , Kenji Takashima , Masaki Azuma , Takashi Iijima , Hiroshi Funakubo , Soichiro Okamura , Nobuhiro Kumada , Satoshi Wada
- 申请人: Hiroshi Saito , Takanori Matsuda , Kaoru Miura , Kenji Takashima , Masaki Azuma , Takashi Iijima , Hiroshi Funakubo , Soichiro Okamura , Nobuhiro Kumada , Satoshi Wada
- 申请人地址: JP Tokyo JP Kyoto-shi JP Tokyo JP Kofu-shi JP Tokyo JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA,KYOTO UNIVERSITY,TOKYO INSTITUTE OF TECHNOLOGY,UNIVERSITY OF YAMANASHI,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY,TOKYO UNIVERSITY OF SCIENCE EDUCATIONAL FOUNDATION ADMINISTRATIVE ORGANIZATION
- 当前专利权人: CANON KABUSHIKI KAISHA,KYOTO UNIVERSITY,TOKYO INSTITUTE OF TECHNOLOGY,UNIVERSITY OF YAMANASHI,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY,TOKYO UNIVERSITY OF SCIENCE EDUCATIONAL FOUNDATION ADMINISTRATIVE ORGANIZATION
- 当前专利权人地址: JP Tokyo JP Kyoto-shi JP Tokyo JP Kofu-shi JP Tokyo JP Tokyo
- 优先权: JP2008-322831 20081218
- 主分类号: H01L41/187
- IPC分类号: H01L41/187
摘要:
Provided are an oxynitride piezoelectric material which exhibits ferroelectricity and has good piezoelectric properties and a method of producing the oxynitride piezoelectric material. The oxynitride piezoelectric material includes a tetragonal perovskite-type oxynitride represented by the following general formula (1): A1-xBix+δ1B1-yB′y+δ2O3-zNz (1) where A represents a divalent element, B and B′ each represent a tetravalent element, x represents a numerical value of 0.35 or more to 0.6 or less, y represents a numerical value of 0.35 or more to 0.6 or less, z represents a numerical value of 0.35 or more to 0.6 or less, and δ1 and δ2 each represent a numerical value of −0.2 or more to 0.2 or less, in which the A includes at least one kind selected from Ba, Sr, and Ca and the B and the B′ each include at least one kind selected from Ti, Zr, Hf, Si, Ge, and Sn.
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