发明申请
US20100155989A1 STAMPER FOR TRANSFERRING FINE PATTERN AND METHOD FOR MANUFACTURING THEREOF
审中-公开
用于传输精细图案的冲压器及其制造方法
- 专利标题: STAMPER FOR TRANSFERRING FINE PATTERN AND METHOD FOR MANUFACTURING THEREOF
- 专利标题(中): 用于传输精细图案的冲压器及其制造方法
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申请号: US12635730申请日: 2009-12-11
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公开(公告)号: US20100155989A1公开(公告)日: 2010-06-24
- 发明人: Satoshi ISHII , Masahiko Ogino , Noritake Shizawa , Kyoichi Mori , Akihiro Miyauchi
- 申请人: Satoshi ISHII , Masahiko Ogino , Noritake Shizawa , Kyoichi Mori , Akihiro Miyauchi
- 优先权: JP2008-315142 20081211
- 主分类号: B29C59/16
- IPC分类号: B29C59/16 ; B28B1/10
摘要:
An object of the present invention is to provide a stamper for transferring fine pattern and a method for manufacturing the stamper, the stamper has a fine structure layer to improve a continuous transferring property of the resinous stamper, and to allow accurate and continuous transferring. In order to achieve the above object, the present invention provides a stamper for transferring fine pattern, including: a fine structure layer on a supporting substrate, in which the fine structure layer is a polymer of a resinous compound whose principal component is silsesquioxane derivative having a plurality of polymerizable functional groups.