发明申请
- 专利标题: MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 微机电系统(MEMS)麦克风及其制造方法
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申请号: US12509411申请日: 2009-07-24
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公开(公告)号: US20100158281A1公开(公告)日: 2010-06-24
- 发明人: Jae Woo LEE , Kang Ho Park , Jong Dae Kim
- 申请人: Jae Woo LEE , Kang Ho Park , Jong Dae Kim
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2008-0131632 20081222
- 主分类号: H04R25/00
- IPC分类号: H04R25/00 ; H01L21/30
摘要:
Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.