发明申请
- 专利标题: ELECTROSTATIC CHUCK SHIELDING MECHANISM
- 专利标题(中): 静电切割机械
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申请号: US12340936申请日: 2008-12-22
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公开(公告)号: US20100159153A1公开(公告)日: 2010-06-24
- 发明人: Kan Ota , Stanley W. Stone , Steve T. Drummond
- 申请人: Kan Ota , Stanley W. Stone , Steve T. Drummond
- 申请人地址: US MA Beverly
- 专利权人: Axcelis Technologies, Inc.
- 当前专利权人: Axcelis Technologies, Inc.
- 当前专利权人地址: US MA Beverly
- 主分类号: C23C14/50
- IPC分类号: C23C14/50
摘要:
An end station for an ion implantation system is provided, wherein the end station comprises a process chamber configured to receive an ion beam. A load lock chamber is coupled to the process chamber and configured to selectively introduce a workpiece into the process chamber. An electrostatic chuck within the process chamber is configured to selectively translate through the ion beam, and a shield within the process chamber is configured to selectively cover at least a portion of a clamping surface of the electrostatic chuck to protect the clamping surface from one or more contaminants associated with the ion beam. A docking station within the process chamber selectively retains the shield, and a transfer mechanism is configured to transfer a workpiece between the load lock chamber and the electrostatic chuck, and to transfer the shield between the docking station and the clamping surface of the electrostatic chuck.
公开/授权文献
- US09611540B2 Electrostatic chuck shielding mechanism 公开/授权日:2017-04-04
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