发明申请
US20100168582A1 HIGH FREQUENCY TRANSDUCERS AND METHODS OF MAKING THE TRANSDUCERS 审中-公开
高频传感器及其制作方法

HIGH FREQUENCY TRANSDUCERS AND METHODS OF MAKING THE TRANSDUCERS
摘要:
A method of making an ultrasound transducer includes providing a piezoelectric crystal of PIN-PMN-PT (lead indium niobate-lead magnesium niobate-lead titanate) and etching kerfs into the piezoelectric crystal using a laser. In at least some embodiments, each kerf has a width of no more than 4 μm. The kerfs are filled with a non-piezoelectric material to form an array of piezoelectric elements.
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