发明申请
US20100182589A1 SPECTRAL DETECTION METHOD AND DEVICE, AND DEFECT INSPECTION METHOD AND APPARATUS USING THE SAME
有权
光谱检测方法和装置,以及缺陷检查方法和使用其的装置
- 专利标题: SPECTRAL DETECTION METHOD AND DEVICE, AND DEFECT INSPECTION METHOD AND APPARATUS USING THE SAME
- 专利标题(中): 光谱检测方法和装置,以及缺陷检查方法和使用其的装置
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申请号: US12626963申请日: 2009-11-30
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公开(公告)号: US20100182589A1公开(公告)日: 2010-07-22
- 发明人: Takenori HIROSE , Minoru Yoshida , Hideaki Sasazawa , Yasuhiro Yoshitake
- 申请人: Takenori HIROSE , Minoru Yoshida , Hideaki Sasazawa , Yasuhiro Yoshitake
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 优先权: JP2009-007160 20090116
- 主分类号: G01J3/08
- IPC分类号: G01J3/08 ; G01J3/00
摘要:
In spectral detection for detecting the shape of repeating pattern structures uniformly formed on a surface of a test object, it is advantageous to use light having a wide wavelength range in a short wavelength region. However, it is not easy to realize a relatively simple optical system capable of spectral detection of light having a wide wavelength range in a short wavelength region, namely in ultraviolet region. The present invention provides an inspection apparatus for detecting pattern defects. The inspection apparatus includes a spectral detection optical system capable of spectral detection of light in a wavelength range from deep ultraviolet to near infrared. The spectral detection optical system includes a spatially partial mirror serving as a half mirror and a reflecting objective provided with an aperture stop for limiting the angle and direction of light to be applied to and reflected by a test object.