发明申请
- 专利标题： PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT AND MANUFACTURING METHOD OF THE SAME
- 专利标题（中）： 压电元件及其制造方法
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申请号： US12693710申请日： 2010-01-26
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公开(公告)号： US20100187953A1公开(公告)日： 2010-07-29
- 发明人: Takao Ohnishi , Yuhji Umeda , Naoki Goto
- 申请人： Takao Ohnishi , Yuhji Umeda , Naoki Goto
- 申请人地址： JP Nagoya-City
- 专利权人： NGK Insulators, Ltd.
- 当前专利权人： NGK Insulators, Ltd.
- 当前专利权人地址： JP Nagoya-City
- 优先权： JP2009-018424 20090129
- 主分类号： H01L41/047
- IPC分类号： H01L41/047 ; H01L41/22
摘要：
There is disclosed a piezoelectric/electrostrictive element which can be used as a sensor, even if a piezoelectric/electrostrictive layer cracks. Provided is a piezoelectric/electrostrictive element 10 comprising a substrate 11, a lower electrode layer 12 secured onto the substrate 11, and a piezoelectric/electrostrictive layer 13 secured onto the lower electrode layer 12, and the coverage of the lower electrode layer 12 with respect to the substrate 11 is 98% or less.