发明申请
- 专利标题: WORK TRANSFER APPARATUS
- 专利标题(中): 工作传送装置
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申请号: US12647194申请日: 2009-12-24
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公开(公告)号: US20100196124A1公开(公告)日: 2010-08-05
- 发明人: Kunio Fukuma , Hideki Matsuo
- 申请人: Kunio Fukuma , Hideki Matsuo
- 申请人地址: JP Osaka
- 专利权人: DAIHEN CORPORATION
- 当前专利权人: DAIHEN CORPORATION
- 当前专利权人地址: JP Osaka
- 优先权: JP2008-333559 20081226
- 主分类号: H01L21/673
- IPC分类号: H01L21/673 ; H01L21/677
摘要:
A work transfer apparatus includes a work carrying mechanism, a driving source that drives the work carrying mechanism, a sealed box that accommodates the driving source in a hermetically sealed state, and a coolant circulation path provided in the sealed box for cooling the driving source. The sealed box includes a box body with an opening, and a partition lid for closing the opening. The partition lid includes an outer plate member and an inner plate member superposed on the outer plate member. The coolant circulation path is disposed at the interface between the outer plate member and the inner plate member.
公开/授权文献
- US08479607B2 Work transfer apparatus 公开/授权日:2013-07-09
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