Invention Application
US20100197043A1 STRUCTURE AND METHOD FOR FABRICATING CLADDED CONDUCTIVE LINES IN MAGNETIC MEMORIES
有权
用于在磁记忆体中制造层状导电线的结构和方法
- Patent Title: STRUCTURE AND METHOD FOR FABRICATING CLADDED CONDUCTIVE LINES IN MAGNETIC MEMORIES
- Patent Title (中): 用于在磁记忆体中制造层状导电线的结构和方法
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Application No.: US12363404Application Date: 2009-01-30
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Publication No.: US20100197043A1Publication Date: 2010-08-05
- Inventor: Nicholas D. RIZZO , Kenneth H. SMITH , Sanjeev AGGARWAL , Anthony CIANCIO , Brian R. BUTCHER , Kelly Wayne KYLER
- Applicant: Nicholas D. RIZZO , Kenneth H. SMITH , Sanjeev AGGARWAL , Anthony CIANCIO , Brian R. BUTCHER , Kelly Wayne KYLER
- Applicant Address: US AZ Chandler
- Assignee: EVERSPIN TECHNOLOGIES, INC.
- Current Assignee: EVERSPIN TECHNOLOGIES, INC.
- Current Assignee Address: US AZ Chandler
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of forming a magnetoelectronic device includes forming a dielectric material (114) surrounding a magnetic bit (112), etching the dielectric material (114) to define an opening (122) over the magnetic bit (112) without exposing the magnetic bit (112), the opening (122) having a sidewall, depositing a blanket layer (132) of cladding material over the dielectric material (118), including over the sidewall, removing by a sputtering process the blanket layer (132) in the bottom of the opening (122) and the dielectric material (124) over the magnetic bit (112), and forming a conductive material (146) within the opening (122) to form a bit line (154). This process reduces errors caused by process irregularities such as edges of the bits (112) protruding and thereby causing defects in the cladding layer (132) formed thereover. A bit line or digit line so formed may optionally be tapered at the ends (182, 184) to prevent magnetic reversal of the bit line magnetic moment that otherwise may occur due to external magnetic fields.
Public/Granted literature
- US07833806B2 Structure and method for fabricating cladded conductive lines in magnetic memories Public/Granted day:2010-11-16
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