发明申请
- 专利标题: CAPACITIVE PRESSURE SENSOR
- 专利标题(中): 电容式压力传感器
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申请号: US12451209申请日: 2008-06-04
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公开(公告)号: US20100199778A1公开(公告)日: 2010-08-12
- 发明人: Frank Hegner , Andreas Rossberg , Ulfert Drewes , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
- 申请人: Frank Hegner , Andreas Rossberg , Ulfert Drewes , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
- 申请人地址: DE Maulburg
- 专利权人: ENDRESS + HAUSER GMBH + CO. KG
- 当前专利权人: ENDRESS + HAUSER GMBH + CO. KG
- 当前专利权人地址: DE Maulburg
- 优先权: DE102007026243.6 20070604
- 国际申请: PCT/EP2008/056880 WO 20080604
- 主分类号: G01L9/12
- IPC分类号: G01L9/12 ; H01R43/00
摘要:
A pressure sensor includes a platform 1 and an elastic measuring membrane 2, which is joined with a surface of the platform 1 to form a measuring chamber 3 sealed closed at the edge, wherein the platform 1 and/or the measuring membrane 2 comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode 6, which faces the surface of the platform 2, the surface of the platform 1 has at least a second electrode 5, which faces that of the measuring membrane 2, wherein the capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.
公开/授权文献
- US08104353B2 Capacitive pressure sensor 公开/授权日:2012-01-31
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