发明申请
- 专利标题: METROLOGY METHODS AND APPARATUS FOR NANOMATERIAL CHARACTERIZATION OF ENERGY STORAGE ELECTRODE STRUCTURES
- 专利标题(中): 能量储存电极结构的纳米材料特征的计量方法和装置
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申请号: US12368105申请日: 2009-02-09
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公开(公告)号: US20100200403A1公开(公告)日: 2010-08-12
- 发明人: Sergey D. Lopatin , Dmitri A. Brevnov , Eric Casavant , Robert Z. Bachrach
- 申请人: Sergey D. Lopatin , Dmitri A. Brevnov , Eric Casavant , Robert Z. Bachrach
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: C25D15/02
- IPC分类号: C25D15/02 ; C25B11/10
摘要:
Embodiments described herein generally relate to methods and apparatus for forming an electrode structure used in an energy storage device. More particularly, embodiments described herein relate to methods and apparatus for characterizing nanomaterials used in forming high capacity electrode structures for energy storage devices. In one embodiment a process for forming an electrode structure for an energy storage device is provided. The process comprises depositing a columnar metal structure over a substrate at a first current density by a diffusion limited deposition process, measuring a capacitance of the columnar metal structure to determine a surface area of the columnar metal structure, and depositing three dimensional porous metal structures over the columnar metal structure at a second current density greater than the first current density.
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