发明申请
- 专利标题: Semiconductor Devices and Methods of Manufacture Thereof
- 专利标题(中): 半导体器件及其制造方法
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申请号: US12769271申请日: 2010-04-28
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公开(公告)号: US20100207238A1公开(公告)日: 2010-08-19
- 发明人: Armin Tilke , Cajetan Wagner , Lincoln O'Riain
- 申请人: Armin Tilke , Cajetan Wagner , Lincoln O'Riain
- 主分类号: H01L29/06
- IPC分类号: H01L29/06
摘要:
Semiconductor devices and methods of manufacture thereof are disclosed. In a preferred embodiment, a semiconductor device includes a workpiece having a buried layer disposed beneath a top portion of the workpiece. An isolation ring structure is disposed within the top portion of the workpiece extending completely through at least a portion of the buried layer, the isolation ring structure comprising a ring having an interior region. A diffusion confining structure is disposed within the interior region of the isolation ring structure. A conductive region is disposed within the top portion of the workpiece within a portion of the interior of the isolation ring structure, the conductive region comprising at least one dopant element implanted and diffused into the top portion of the workpiece. The diffusion confining structure defines at least one edge of the conductive region, and the conductive region is coupled to the buried layer.
公开/授权文献
- US08115279B2 Semiconductor devices and methods of manufacture thereof 公开/授权日:2012-02-14
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