发明申请
US20100207411A1 MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO-AXIS FORCE SENSORS
有权
具有双轴力传感器的基于MEMS的微型和纳米拖板
- 专利标题： MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO-AXIS FORCE SENSORS
- 专利标题（中）： 具有双轴力传感器的基于MEMS的微型和纳米拖板
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申请号： US12305468申请日： 2007-06-21
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公开(公告)号： US20100207411A1公开(公告)日： 2010-08-19
- 发明人: Yu Sun , Keekyoung Kim
- 申请人： Yu Sun , Keekyoung Kim
- 优先权： CA2,551,191 20060623
- 国际申请： PCT/CA2007/001090 WO 20070621
- 主分类号： B81B7/02
- IPC分类号： B81B7/02 ; B25J7/00 ; B81B3/00 ; H01R43/00
摘要：
The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.
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