发明申请
- 专利标题: METHOD FOR WAFER TEST AND PROBE CARD FOR THE SAME
- 专利标题(中): 用于其测试和探针卡的方法
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申请号: US12734049申请日: 2008-10-08
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公开(公告)号: US20100207652A1公开(公告)日: 2010-08-19
- 发明人: In Buhm Chung , Byung Chang Song , Dong Il Kim
- 申请人: In Buhm Chung , Byung Chang Song , Dong Il Kim
- 专利权人: Amst Co., Ltd.
- 当前专利权人: Amst Co., Ltd.
- 优先权: KR10-2007-0100771 20071008; KR10-2008-0090110 20080912
- 国际申请: PCT/KR2008/005900 WO 20081008
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A method of testing a wafer capable of minimizing the asymmetrical thermal deformation of a probe card when a wafer is tested using a probe card and of minimizing the number of times of tests to effectively test a large area wafer and a probe card for the same is presented. For the wafer test method for testing semiconductor chips on a wafer using a probe card, the method includes creating virtual repeating units corresponding to N semiconductor chips, wherein the N is natural number larger than or equal to 2, arranging the plurality of repeating units on the wafer and moving the probe card or the wafer N times and testing the semiconductor chips on a wafer, wherein the semiconductor chips in the repeating units are sequentially tested one by one per each touchdown. Also, the probe cards to realize above mentioned method have been described.
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