发明申请
- 专利标题: METHOD OF MANUFACTURING MONOCRYSTAL, FLOW STRAIGHTENING CYLINDER, AND MONOCRYSTAL PULLING-UP DEVICE
- 专利标题(中): 制造单晶,流动圆柱滚筒和单晶拉丝装置的方法
-
申请号: US12678400申请日: 2008-07-25
-
公开(公告)号: US20100212580A1公开(公告)日: 2010-08-26
- 发明人: Shinichi Kawazoe , Fukuo Ogawa , Yasuhito Narushima , Toshimichi Kubota
- 申请人: Shinichi Kawazoe , Fukuo Ogawa , Yasuhito Narushima , Toshimichi Kubota
- 申请人地址: JP Omura-shi, Nagasaki
- 专利权人: SUMCO TECHXIV CORPORATION
- 当前专利权人: SUMCO TECHXIV CORPORATION
- 当前专利权人地址: JP Omura-shi, Nagasaki
- 国际申请: PCT/JP2008/063398 WO 20080725
- 主分类号: C30B15/30
- IPC分类号: C30B15/30 ; C30B15/24 ; C30B29/06
摘要:
For manufacturing a monocrystal, a monocrystal pulling-up device controls pressure within a flow straightening cylinder to be from 33331 Pa to 79993 Pa and a flow velocity of inert gas in the cylinder to be from 0.06 m/sec to 0.31 m/sec (0.005 to 0.056 SL/min·cm2) during a post-addition-pre-growth period. By controlling the flow velocity of the inert gas to be in the above-described range during the post-addition-pre-growth period, the inert gas flows smoothly even when the pressure within the cylinder is relatively high. Evaporation of a volatile dopant because of a reverse flow of the inert gas can be restrained. The volatile dopant can be prevented from adhering to the flow straightening cylinder in an amorphous state, and the volatile dopant can be prevented from dropping into a melt or sticking on the melt while growing a crystal. Foulings can be easily removed.
公开/授权文献
信息查询
IPC分类: