Invention Application
- Patent Title: FABRICATING METHOD OF ELECTRON-EMITTING DEVICE
- Patent Title (中): 电子发射装置的制造方法
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Application No.: US12500610Application Date: 2009-07-10
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Publication No.: US20100216366A1Publication Date: 2010-08-26
- Inventor: Chih-Hao Tsai , Kuan-Jung Chen , Fu-Ming Pan , Chi-Neng Mo , Kuo-Chung Lo , Mei-Tsao Chiang
- Applicant: Chih-Hao Tsai , Kuan-Jung Chen , Fu-Ming Pan , Chi-Neng Mo , Kuo-Chung Lo , Mei-Tsao Chiang
- Applicant Address: TW Taoyuan
- Assignee: CHUNGHWA PICTURE TUBES, LTD.
- Current Assignee: CHUNGHWA PICTURE TUBES, LTD.
- Current Assignee Address: TW Taoyuan
- Priority: TW98105422 20090220
- Main IPC: H01J9/02
- IPC: H01J9/02

Abstract:
A fabricating method of an electron-emitting device is provided. The fabricating method of the electron-emitting device includes at least following procedures. Firstly, a substrate is provided. Next, a first electrode and a second electrode are formed on the substrate. Afterward, a conductive layer covering the first electrode and the second electrode is formed on the substrate. Then, a first conductive layer, a second conductive layer and a gap are formed by patterning the conductive layer. The gap is disposed between the first conductive layer and the second conductive layer. After that, a plasma process is performed at the first conductive layer and second conductive layer.
Public/Granted literature
- US08157606B2 Fabricating method of electron-emitting device Public/Granted day:2012-04-17
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