发明申请
- 专利标题： Systems and Methods of Laser Texturing and Crystallization of Material Surfaces
- 专利标题（中）： 材料表面的激光纹理和结晶的系统和方法
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申请号： US12158553申请日： 2006-12-21
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公开(公告)号： US20100219506A1公开(公告)日： 2010-09-02
- 发明人: Mool C. Gupta , Barada K. Nayak
- 申请人： Mool C. Gupta , Barada K. Nayak
- 申请人地址： US VA Charlottesville
- 专利权人： UNIVERSITY OF VIRGINIA PATENT FOUNDATION
- 当前专利权人： UNIVERSITY OF VIRGINIA PATENT FOUNDATION
- 当前专利权人地址： US VA Charlottesville
- 国际申请： PCT/US06/49065 WO 20061221
- 主分类号： H01L29/06
- IPC分类号： H01L29/06 ; H01L21/302 ; B32B3/30
摘要：
The surface of a material is textured and crystallized in a single step by exposing the surface to pulses from an ultrafast laser. The laser treatment causes pillars to form on the treated surface. These pillars provide for greater light absorption. The crystallization of the material provides for higher electric conductivity and changes in optical properties of the material. The method may be performed in a gaseous environment, so that laser assisted chemical etching will aid in the texturing of the surface. This method may be used on various material surfaces, such as semiconductors, metals, ceramics, polymers, and glasses.
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