发明申请
- 专利标题： LAYERED SCANNING CHARGED PARTICLE MICROSCOPE PACKAGE FOR A CHARGED PARTICLE AND RADIATION DETECTOR
- 专利标题（中）： 用于带电粒子和辐射探测器的层状扫描粒子微粒包装
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申请号： US12718940申请日： 2010-03-05
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公开(公告)号： US20100224779A1公开(公告)日： 2010-09-09
- 发明人: Scott W. Indermuehle , Charles S. Silver , James P. Spallas , Lawrence P. Muray
- 申请人： Scott W. Indermuehle , Charles S. Silver , James P. Spallas , Lawrence P. Muray
- 主分类号： H01J37/28
- IPC分类号： H01J37/28 ; G01N23/22
摘要：
A scanning charged particle microscope includes a layered charged particle beam column package; a sample holder; and a layered micro-channel plate detector package located between the column package and the sample holder.