发明申请
- 专利标题: Hollow-cathode plasma generator
- 专利标题(中): 空心阴极等离子体发生器
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申请号: US11896620申请日: 2007-09-04
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公开(公告)号: US20100225234A1公开(公告)日: 2010-09-09
- 发明人: Ching-Pei Tseng , Cheng-Chang Hsieh , Chi-Fong Ai , Chia-Cheng Lee , Tien-Hsiang Hsueh , Chun-Han Wang
- 申请人: Ching-Pei Tseng , Cheng-Chang Hsieh , Chi-Fong Ai , Chia-Cheng Lee , Tien-Hsiang Hsueh , Chun-Han Wang
- 申请人地址: TW Taoyuan
- 专利权人: ATOMIC ENERGY COUNCIL - INSTITUTE OF NUCLEAR ENERGY RESEARCH
- 当前专利权人: ATOMIC ENERGY COUNCIL - INSTITUTE OF NUCLEAR ENERGY RESEARCH
- 当前专利权人地址: TW Taoyuan
- 主分类号: H05H1/24
- IPC分类号: H05H1/24
摘要:
A hollow-cathode plasma generator includes a plurality of hollow cathodes joined together and connected to a power supply for generating plasma in vacuum. Each of the hollow cathodes includes at least one fillister defined therein, a fin formed on a side of the fillister, an air-circulating tunnel in communication with the fillister and a coolant-circulating tunnel defined therein. The fillister is used to contain working gas. The fin receives negative voltage from the power supply for ionizing the working gas to generate the plasma and spread the plasma in a single direction. The working gas travels into the fillister from the air-circulating tunnel. The coolant-circulating tunnel is used to circulate coolant for cooling the hollow cathode.
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