发明申请
- 专利标题: BEAM IRRADIATION DEVICE AND POSITION DETECTING DEVICE
- 专利标题(中): 光束辐射装置和位置检测装置
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申请号: US12718453申请日: 2010-03-05
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公开(公告)号: US20100225930A1公开(公告)日: 2010-09-09
- 发明人: Yoshiaki Maeno , Atsushi Yamaguchi
- 申请人: Yoshiaki Maeno , Atsushi Yamaguchi
- 申请人地址: JP Moriguchi-shi JP Bunkyo-ku
- 专利权人: SANYO Electric Co., Ltd.,SANYO Optec Design Co., Ltd.
- 当前专利权人: SANYO Electric Co., Ltd.,SANYO Optec Design Co., Ltd.
- 当前专利权人地址: JP Moriguchi-shi JP Bunkyo-ku
- 优先权: JP2009-54152 20090306
- 主分类号: G01B11/14
- IPC分类号: G01B11/14 ; G02B26/10
摘要:
In a beam irradiation device, laser light emitted from a laser light source is entered into a mirror. An actuator pivotally moves the mirror into which laser light is entered, whereby a targeted area is scanned with the laser light. Servo light emitted from a semiconductor laser is entered into a hologram element. The hologram element is pivotally moved with the pivotal movement of the mirror. A diffraction pattern is formed on an exit surface of the hologram element. A photodetector receives servo light transmitted through the hologram element to output a signal depending on a light receiving position of the servo light. The scan width of servo light on the photodetector is increased by a diffraction function of the hologram element.
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