发明申请
US20100227069A1 APPARATUS FOR REDUCING COST OF DEVELOPER AND THE METHOD THEREOF 审中-公开
降低开发商成本的方法及其方法

APPARATUS FOR REDUCING COST OF DEVELOPER AND THE METHOD THEREOF
摘要:
An apparatus for homogenizing the developer concentration on the wafer and reducing the developer cost and the method thereof are provided in the present invention. The developer is provided on the wafer which then is spun to distribute the developer on the wafer. Next, the mechanical turbulence of the developer is produced on the wafer by the turbulence device or the mega-sonic vibrator. The apparatus is able to improve the uniformity of developer concentration, and the developer consumption is reduced.
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