发明申请
US20100229646A1 OSCILLATING ANGULAR SPEED SENSOR 失效
振动角速度传感器

OSCILLATING ANGULAR SPEED SENSOR
摘要:
An oscillating angular speed sensor includes a detector, a driving portion, and a separating portion. When an angular speed is generated while the detector is driven to oscillate by the driving portion, Coriolis force is applied to the detector. Therefore, the angular speed is detected based on a capacitance variation in accordance with a variation of an interval between a movable electrode and a fixed electrode of the detector. The separating portion is distanced from the detector and the driving portion, and is configured to separate a first space accommodating the detector and a second space accommodating the driving portion.
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