发明申请
- 专利标题： PIEZOELECTRIC MATERIAL, PIEZOELECTRIC DEVICE, AND METHOD OF PRODUCING THE PIEZOELECTRIC DEVICE
- 专利标题（中）： 压电材料，压电元件以及压电元件的制造方法
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申请号： US12721131申请日： 2010-03-10
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公开(公告)号： US20100231095A1公开(公告)日： 2010-09-16
- 发明人: Makoto Kubota , Kenji Takashima , Masaki Azuma , Yoshitaka Nakamura , Yuichi Shimakawa , Takashi Iijima , Bong-Yeon Lee
- 申请人： Makoto Kubota , Kenji Takashima , Masaki Azuma , Yoshitaka Nakamura , Yuichi Shimakawa , Takashi Iijima , Bong-Yeon Lee
- 申请人地址： JP Tokyo JP Kyoto-shi JP Tokyo
- 专利权人： Canon Kabushiki Kaisha,Kyoto University,National Institute of Advanced Industrial Science Technology
- 当前专利权人： Canon Kabushiki Kaisha,Kyoto University,National Institute of Advanced Industrial Science Technology
- 当前专利权人地址： JP Tokyo JP Kyoto-shi JP Tokyo
- 优先权： JP2009-060269 20090312
- 主分类号： H01L41/18
- IPC分类号： H01L41/18 ; C04B35/01 ; H01L41/047 ; H01L41/22
摘要：
Provided are a bismuth-based piezoelectric material whose insulation property is improved while its performance as a piezoelectric body is not impaired and a piezoelectric device using the piezoelectric material. The piezoelectric material includes a perovskite-type metal oxide represented by the following general formula (1): Bix(Fe1-yCoy)O3 (1) where 0.95≦x≦1.25 and 0≦y≦0.30, and a root mean square roughness Rq (nm) of a surface of the piezoelectric material satisfies a relationship of 0
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