发明申请
- 专利标题: PIEZOELECTRIC MATERIAL, METHOD OF MANUFACTURING THE SAME, AND PIEZOELECTRIC DEVICE
- 专利标题(中): 压电材料,其制造方法和压电装置
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申请号: US12720833申请日: 2010-03-10
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公开(公告)号: US20100231096A1公开(公告)日: 2010-09-16
- 发明人: Hiroshi Saito , Toshihiro Ifuku , Satoshi Wada , Nobuhiro Kumada , Keisuke Yamato , Takashi Iijima , Bong-Yeon Lee
- 申请人: Hiroshi Saito , Toshihiro Ifuku , Satoshi Wada , Nobuhiro Kumada , Keisuke Yamato , Takashi Iijima , Bong-Yeon Lee
- 申请人地址: JP Tokyo JP Kofu-shi JP Tokyo
- 专利权人: Canon Kabushiki Kaisha,University of Yamanashi,National Institute of Advanced Industrial Science and Technology
- 当前专利权人: Canon Kabushiki Kaisha,University of Yamanashi,National Institute of Advanced Industrial Science and Technology
- 当前专利权人地址: JP Tokyo JP Kofu-shi JP Tokyo
- 优先权: JP2009-060265 20090312
- 主分类号: H01L41/187
- IPC分类号: H01L41/187 ; H01L41/18
摘要:
Provided is a piezoelectric material having a good piezoelectric property and Curie temperature (Tc) of 150° C. or higher, and a piezoelectric device using the piezoelectric material. The piezoelectric material includes a sintered body made of a perovskite-type metal oxide represented by the following general formula (1): xBi(Mg1/2Ti1/2)O3−(1−x)BaTiO3 (1), where x satisfies 0.17≦x≦0.8, in which an average grain size of grains contained in the sintered body is 0.5 μm or larger to 10 μm or smaller, and the sintered body is polycrystal. In addition, the piezoelectric device includes a piezoelectric material and a pair of electrodes disposed in contact with the piezoelectric material, in which the piezoelectric material is the above-mentioned piezoelectric material.
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