发明申请
- 专利标题: OPTICAL SYSTEM
- 专利标题(中): 光学系统
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申请号: US12782831申请日: 2010-05-19
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公开(公告)号: US20100231888A1公开(公告)日: 2010-09-16
- 发明人: Ralf Mueller , Toralf Gruner
- 申请人: Ralf Mueller , Toralf Gruner
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT AG
- 当前专利权人: CARL ZEISS SMT AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DE102007055567.0 20071120
- 主分类号: G03B27/72
- IPC分类号: G03B27/72 ; G02B27/28 ; G03F7/20
摘要:
The disclosure provides an optical system having an optical axis, where the optical system includes a polarization manipulator which includes first and second subelements. The first subelement has a non-planar, optically effective surface. For light passing through the first subelement, the first subelement causes a change in the polarization state. A maximum effective retardation introduced by the first subelement along the optical axis is less than a quarter of the working wavelength of the optical system. The first subelement and the second subelement have mutually facing surfaces which are mutually complementary. The optical system also includes a position manipulator to manipulate the relative position of the first and second subelements.
公开/授权文献
- US08379188B2 Optical system 公开/授权日:2013-02-19