发明申请
US20100236644A1 Methods of Operating Microvalve Assemblies and Related Structures and Related Devices
审中-公开
微型阀组件及相关结构及相关设备的运行方法
- 专利标题: Methods of Operating Microvalve Assemblies and Related Structures and Related Devices
- 专利标题(中): 微型阀组件及相关结构及相关设备的运行方法
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申请号: US12794157申请日: 2010-06-04
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公开(公告)号: US20100236644A1公开(公告)日: 2010-09-23
- 发明人: Kevin R. Douglas , William O. Teach , Paul W. Gibson , Donald C. Harris , Scott H. Goodwin , David E. Dausch , Wayne D. Dettloff
- 申请人: Kevin R. Douglas , William O. Teach , Paul W. Gibson , Donald C. Harris , Scott H. Goodwin , David E. Dausch , Wayne D. Dettloff
- 主分类号: G05D7/06
- IPC分类号: G05D7/06
摘要:
A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.