发明申请
- 专利标题: ABNORMALITY DETECTING APPARATUS FOR DETECTING ABNORMALITY AT INTERFACE PORTION OF CONTACT ARM
- 专利标题(中): 用于检测接触臂接口部异常的异常检测装置
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申请号: US12738780申请日: 2007-10-31
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公开(公告)号: US20100239155A1公开(公告)日: 2010-09-23
- 发明人: Masayoshi Ichikawa , Hiroki Ikeda
- 申请人: Masayoshi Ichikawa , Hiroki Ikeda
- 申请人地址: JP Tokyo
- 专利权人: ADVANTEST CORPORATION
- 当前专利权人: ADVANTEST CORPORATION
- 当前专利权人地址: JP Tokyo
- 国际申请: PCT/JP2007/071203 WO 20071031
- 主分类号: G06K9/00
- IPC分类号: G06K9/00
摘要:
An abnormality detecting apparatus includes an imaging device for obtaining image data of a TIM, a failure detecting section for detecting appearance failures of the TIM on the basis of the image data of the TIM obtained by the imaging device, and a determining device for determining whether an abnormality occurs at the TIM on the basis of a detection result by the failure detecting section.
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