发明申请
- 专利标题: Piezoelectric element and gyroscope
- 专利标题(中): 压电元件和陀螺仪
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申请号: US12659997申请日: 2010-03-26
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公开(公告)号: US20100244632A1公开(公告)日: 2010-09-30
- 发明人: Kazuya Maekawa , Takao Noguchi , Kenichi Tochi , Ken Unno
- 申请人: Kazuya Maekawa , Takao Noguchi , Kenichi Tochi , Ken Unno
- 申请人地址: JP TOKYO
- 专利权人: TDK CORPORATION
- 当前专利权人: TDK CORPORATION
- 当前专利权人地址: JP TOKYO
- 优先权: JP2009-084279 20090331
- 主分类号: H01L41/04
- IPC分类号: H01L41/04
摘要:
A piezoelectric element having a crystal structure that enables a piezoelectric film to be formed in an unstressed state is provided. The piezoelectric film contains an a-axis oriented crystal and a c-axis oriented crystal, where a difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 Å. The present inventors have newly found that a stress accumulated in the piezoelectric film can be reduced while maintaining favorable piezoelectric properties when a condition that the difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 Å is satisfied. When the condition is satisfied, the c-axis oriented crystal and the a-axis oriented crystal are properly balanced and as a result crystal particles of the piezoelectric film are closest-packed on its base in an ideal state, which contributes to a reduced stress.
公开/授权文献
- US08148878B2 Piezoelectric element and gyroscope 公开/授权日:2012-04-03