发明申请
- 专利标题： MICROPATTERN TRANSFER STAMPER AND MICROPATTERN TRANSFER DEVICE
- 专利标题（中）： 微波转印器和微波传输器件
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申请号： US12752808申请日： 2010-04-01
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公开(公告)号： US20100255139A1公开(公告)日： 2010-10-07
- 发明人: Ryuta WASHIYA , Masahiko Ogino , Noritake Shizawa , Kyoichi Mori , Akihiro Miyauchi
- 申请人： Ryuta WASHIYA , Masahiko Ogino , Noritake Shizawa , Kyoichi Mori , Akihiro Miyauchi
- 优先权： JP2009-090587 20090403
- 主分类号： B29C59/02
- IPC分类号： B29C59/02
摘要：
A micropattern transfer stamper has a space that hermetically contains fluid, on an opposite side of a surface with an indented pattern formed thereon of a pattern forming sheet member. The pattern forming sheet member is convexly bent by pressure of the fluid contained in the space. When the indented pattern is transferred onto the material to be transferred, the pattern forming sheet member deforms following the surface of the material to be transferred.
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