发明申请
US20100258748A1 SYSTEM, METHOD AND APPARATUS FOR DROPLET CATCHER FOR PREVENTION OF BACKSPLASH IN A EUV GENERATION CHAMBER
有权
用于防止在EUV生成室中发生反冲洗的刮水器的系统，方法和装置
- 专利标题： SYSTEM, METHOD AND APPARATUS FOR DROPLET CATCHER FOR PREVENTION OF BACKSPLASH IN A EUV GENERATION CHAMBER
- 专利标题（中）： 用于防止在EUV生成室中发生反冲洗的刮水器的系统，方法和装置
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申请号： US12720190申请日： 2010-03-09
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公开(公告)号： US20100258748A1公开(公告)日： 2010-10-14
- 发明人: Georgiy O. Vaschenko , William N. Partlo , Igor V. Fomenkov , Richard L. Sandstrom , Alexander I. Ershov , David Brandt , Joshua J. Miller
- 申请人： Georgiy O. Vaschenko , William N. Partlo , Igor V. Fomenkov , Richard L. Sandstrom , Alexander I. Ershov , David Brandt , Joshua J. Miller
- 主分类号： G21K5/02
- IPC分类号： G21K5/02
摘要：
A system and method generating an extreme ultraviolet light in an extreme ultraviolet light chamber including a collector mirror, a droplet generation system having a droplet outlet aligned to output a plurality of droplets along a target material path and a first catch including a first open end substantially aligned to the target material path and at least one internal surface oriented toward a second end of the first catch, the second end being opposite from the first open end.
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