发明申请
- 专利标题： DETECTION APPARATUS AND METHOD
- 专利标题（中）： 检测装置和方法
-
申请号： US12669420申请日： 2008-07-23
-
公开(公告)号： US20100264337A1公开(公告)日： 2010-10-21
- 发明人: Alan Mosley , Gihan Ryu , Hongjin Jiang
- 申请人： Alan Mosley , Gihan Ryu , Hongjin Jiang
- 优先权： GB07143414.5 20070723
- 国际申请： PCT/GB08/02527 WO 20080723
- 主分类号： H01L31/14
- IPC分类号： H01L31/14 ; G02F1/01 ; G01N21/64
摘要：
A detector apparatus and method for detecting radiation emitted from a target comprising: a first transmissive polariser (302) for polarising radiation incident on the target; a second transmissive polariser (304) for polarising the radiation emitted from the target (303) and absorbing any remaining light polarised by the first polariser; and at least one reflective polariser (306) arranged between the first and second transmissive polarisers.
公开/授权文献
- US08575539B2 Detection apparatus and method 公开/授权日：2013-11-05
信息查询
IPC分类:
