发明申请
US20100289079A1 HIGH-VOLTAGE SOI MOS DEVICE STRUCTURE AND METHOD OF FABRICATION
有权
高电压SOI MOS器件结构及其制造方法
- 专利标题: HIGH-VOLTAGE SOI MOS DEVICE STRUCTURE AND METHOD OF FABRICATION
- 专利标题(中): 高电压SOI MOS器件结构及其制造方法
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申请号: US12465857申请日: 2009-05-14
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公开(公告)号: US20100289079A1公开(公告)日: 2010-11-18
- 发明人: Kiran V. Chatty , Robert J. Gauthier, JR. , Jed H. Rankin , Yun Shi , William R. Tonti , Wagdi W. Abadeer , Lilian Kamal
- 申请人: Kiran V. Chatty , Robert J. Gauthier, JR. , Jed H. Rankin , Yun Shi , William R. Tonti , Wagdi W. Abadeer , Lilian Kamal
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L21/8234
摘要:
Structures and methods for integrating a thick oxide high-voltage metal-oxide-semiconductor (MOS) device into a thin oxide silicon-on-insulator (SOI). A method of forming a semiconductor structure includes forming first source and drain regions of a first device below a buried oxide layer of a silicon-on-insulator (SOI) wafer, forming a gate of the first device in a layer of semiconductor material above the buried oxide layer; and forming second source and drain regions of a second device in the layer of semiconductor material above the buried oxide layer.