发明申请
- 专利标题： ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
- 专利标题（中）： 电子设备及其制造方法
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申请号： US12783124申请日： 2010-05-19
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公开(公告)号： US20100294633A1公开(公告)日： 2010-11-25
- 发明人: Tadashi NAKATANI , Hiroaki Inoue , Hitoshi Yamada , Satoshi Ueda
- 申请人： Tadashi NAKATANI , Hiroaki Inoue , Hitoshi Yamada , Satoshi Ueda
- 申请人地址： JP Kawasaki
- 专利权人： FUJITSU LIMITED
- 当前专利权人： FUJITSU LIMITED
- 当前专利权人地址： JP Kawasaki
- 优先权： JP2009-123448 20090521; JP2010-055045 20100311
- 主分类号： H01H57/00
- IPC分类号： H01H57/00
摘要：
An electronic device includes a substrate, a stationary electrode provided above the substrate, a movable electrode that is provided to face the stationary electrode, a wall portion that is provided on the substrate and surrounds the movable electrode and the stationary electrode, a film member that is fixed to the wall portion and seals space including the movable electrode and the stationary electrode, and a support portion that is provided, on an inner side of the wall portion on the substrate, in addition to the movable electrode and the stationary electrode to support the film member from within the space.
公开/授权文献
- US08536963B2 Electronic device and method of manufacturing the same 公开/授权日：2013-09-17
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