发明申请
US20100295560A1 Scanning Impedance Microscopy (SIM) To Map Local Impedance In A Dielectric Film
审中-公开
扫描阻抗显微镜（SIM）映射局部阻抗在介质膜
摘要：
A scanning impedance microscopy device maps out local impedance in a dielectric film sample. This may be used to detect conductive filaments in a dielectric film, to characterize semiconductor interfaces, and to be used a reading scheme for resistive change memory such as RRAM.
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