发明申请
- 专利标题: SHAPE MEASURING DEVICE
- 专利标题(中): 形状测量装置
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申请号: US12745546申请日: 2008-12-02
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公开(公告)号: US20100302551A1公开(公告)日: 2010-12-02
- 发明人: Masaru Akamatsu , Hidehisa Hashizume , Yasuhide Nakai
- 申请人: Masaru Akamatsu , Hidehisa Hashizume , Yasuhide Nakai
- 优先权: JP2007-312034 20071203
- 国际申请: PCT/JP2008/071902 WO 20081202
- 主分类号: G01B11/24
- IPC分类号: G01B11/24
摘要:
When a shape of an end face of a disc-shaped measurement target is to be measured on the basis of its projection image, a shape measuring device in which a non-parallel light component is not contained in a light flux projected to the measurement target as much as possible and moreover, correct shape measurement can be made by ensuring parallelism between a light projection direction and each face of front and back sides of the measurement target.There are provided a collimator lens 3 for having outgoing light of a point light source 2 pass and collimating the same in a light projection direction R1 and a single or a plurality of apertures 8 shielding passage of light in a range outside an image pickup range of a camera seen from the light projection direction R1 or passage of light in a range inside the image pickup range and outside a boundary located in a range outside a projection image of a measurement portion in the light projection direction R1 in the light flux traveling from the collimator lens 3 to the measurement target 1 side. Moreover, a parallel supporting portion 21 for supporting one of the faces of the measurement target 1 in parallel with the light projection direction R1 at a position on the center side with respect to the measurement portion in the measurement target 1 supported by a center sucking and supporting mechanism 9 is provided.
公开/授权文献
- US08228509B2 Shape measuring device 公开/授权日:2012-07-24
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