发明申请
US20100308298A1 NONVOLATILE MEMORY ELEMENT AND NONVOLATILE MEMORY DEVICE INCORPORATING NONVOLATILE MEMORY ELEMENT
有权
非易失性存储器元件和非易失性存储器件,并入非易失性存储元件
- 专利标题: NONVOLATILE MEMORY ELEMENT AND NONVOLATILE MEMORY DEVICE INCORPORATING NONVOLATILE MEMORY ELEMENT
- 专利标题(中): 非易失性存储器元件和非易失性存储器件,并入非易失性存储元件
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申请号: US12745599申请日: 2009-09-29
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公开(公告)号: US20100308298A1公开(公告)日: 2010-12-09
- 发明人: Takeki Ninomiya , Koji Arita , Takumi Mikawa , Satoru Fujii
- 申请人: Takeki Ninomiya , Koji Arita , Takumi Mikawa , Satoru Fujii
- 优先权: JP2008-256027 20081001
- 国际申请: PCT/JP2009/004976 WO 20090929
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; H01L21/16
摘要:
A nonvolatile memory element includes a first electrode (103) formed on a substrate (101), a resistance variable layer (108) and a second electrode (107), wherein the resistance variable layer has a multi-layer structure including at least three layers which are a first transition metal oxide layer (104), a second transition metal oxide layer (106) which is higher in oxygen concentration than the first transition metal oxide layer (104), and a transition metal oxynitride layer (105). The second transition metal oxide layer (106) is in contact with either one of the first electrode (103) and the second electrode (107). The transition metal oxynitride layer (105) is provided between the first transition metal oxide layer (104) and the second transition metal oxide layer (106).
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