发明申请
- 专利标题: PERIODIC DIMPLE ARRAY
- 专利标题(中): 周期性二维阵列
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申请号: US12846401申请日: 2010-07-29
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公开(公告)号: US20100309572A1公开(公告)日: 2010-12-09
- 发明人: Marc Maurice Mignard
- 申请人: Marc Maurice Mignard
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: G02B5/08
- IPC分类号: G02B5/08 ; B05D5/06 ; B29C71/04 ; C23C14/02 ; C23C14/46
摘要:
A microelectromechanical (MEMS) device includes a substrate, an actuation electrode over the substrate, a reflective layer over the actuation electrode, and a support layer between the actuation electrode and the reflective layer. The reflective layer includes at least one aperture through the reflective layer. The support layer includes a recess between the actuation electrode and the at least one aperture. Upon application of a control signal to the device, at least a first portion of the reflective layer is configured to move into the recess and at least a second portion of the reflective layer is configured to remain stationary. The reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion.